Original Performance Specifications: ​

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• Resolution: 3.0nm, (SED Image in High Vacuum Mode at 30kV) 

                         4.0nm, (BSED Image in VP Mode at 30kV)

 

• Chamber size: Specimen size of 200mm in diameter can be inserted.

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• Type II Stage:

  • X Traverse: 100mm   /   Y Traverse: 50mm

  • Rotation: 360° Continuous

  • Z Traverse: 5 – 65mm

  • Tilt Range:  -20° to +90°

  • Motorization: 5-Axis Eucentric

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• Vacuum System:

  • One turbomolecular pump rated at 210 liter/sec

  • One 162 liter/min large-capacity rotary pump

  • 6Pa to 270Pa selectable in the Variable Pressure range

  • Chamber pump down time ~90 seconds

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• Magnification Range: 5X to 300,000X Magnification

 

• SE Detector: Everhart-Thornley secondary electron detector

 

• BSE Detector: Five-segment solid-state detector.

 

• Electron Source: Pre-centered tungsten hairpin type

 

• Accelerating Voltage: 300V to 30kV

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• Analytical Chamber:

  • Nine ports to accommodate EDS, WDS, EBSD and other accessories.

  • Three 35° Take Off Angle analytical ports, 10mm analytical WD.

  • Digital Beam Control (DBC) provides interface for EDX unit.
     

**Brochure available on request